7

Plasma Etching Processes for Interconnect Realization in VLSI || Interaction Plasma/Dielectric

Year:
2015
Language:
english
File:
PDF, 2.63 MB
english, 2015
9

Etching of porous SiOCH materials in fluorocarbon-based plasmas

Year:
2004
Language:
english
File:
PDF, 838 KB
english, 2004
11

Goniotelemetry system

Year:
1987
Language:
english
File:
PDF, 115 KB
english, 1987
30

Plasma Etching Processes for Interconnect Realization in VLSI || Porous SiOCH Film Integration

Year:
2015
Language:
english
File:
PDF, 6.82 MB
english, 2015
47

Books on histology

Year:
1917
Language:
english
File:
PDF, 82 KB
english, 1917